JPH0578787B2 - - Google Patents

Info

Publication number
JPH0578787B2
JPH0578787B2 JP58167852A JP16785283A JPH0578787B2 JP H0578787 B2 JPH0578787 B2 JP H0578787B2 JP 58167852 A JP58167852 A JP 58167852A JP 16785283 A JP16785283 A JP 16785283A JP H0578787 B2 JPH0578787 B2 JP H0578787B2
Authority
JP
Japan
Prior art keywords
diagnosed
force
signal
hammer
response acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58167852A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6058551A (ja
Inventor
Shinichi Noda
Shunzo Watanabe
Osamu Miwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP58167852A priority Critical patent/JPS6058551A/ja
Publication of JPS6058551A publication Critical patent/JPS6058551A/ja
Publication of JPH0578787B2 publication Critical patent/JPH0578787B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/045—Analysing solids by imparting shocks to the workpiece and detecting the vibrations or the acoustic waves caused by the shocks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/269—Various geometry objects
    • G01N2291/2697—Wafer or (micro)electronic parts

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
JP58167852A 1983-09-12 1983-09-12 緩み診断装置 Granted JPS6058551A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58167852A JPS6058551A (ja) 1983-09-12 1983-09-12 緩み診断装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58167852A JPS6058551A (ja) 1983-09-12 1983-09-12 緩み診断装置

Publications (2)

Publication Number Publication Date
JPS6058551A JPS6058551A (ja) 1985-04-04
JPH0578787B2 true JPH0578787B2 (en]) 1993-10-29

Family

ID=15857281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58167852A Granted JPS6058551A (ja) 1983-09-12 1983-09-12 緩み診断装置

Country Status (1)

Country Link
JP (1) JPS6058551A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0413323D0 (en) * 2004-06-14 2004-07-21 Engspire Ltd Underwater inspection apparatus and method
JP6186241B2 (ja) * 2013-10-21 2017-08-23 アプライドリサーチ株式会社 ボルトの健全性診断方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5826261B2 (ja) * 1978-07-11 1983-06-01 新日本製鐵株式会社 電気機器巻線の緩み検出方法
JPS5779445A (en) * 1980-11-04 1982-05-18 Mitsubishi Electric Corp Blow diagnosis device

Also Published As

Publication number Publication date
JPS6058551A (ja) 1985-04-04

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